General Information 

Professor Information

Instructor Profile Picture

Instructor

Mubarak Mujawar

Office

EC3942

phone

(305) 348-2683

Office Hours

By Appointment

Website

Course Description and Purpose

This class will help students understand how modern devices such as iphone and smart phone sensors, automobile safety sensors, biomedical sensors, implantable devices, gaming consoles, virtual reality and augmented reality sensors, Digital Light Processing (DLP) in display devices. This course is an introduction to microfabrication techniques intended for graduate and senior students to familiarize engineering and science students to the science of miniaturization. Different options to make very small machines (micro and nano size) are reviewed. The course covers such subjects as materials properties, fabrication techniques, packaging, and applications.

Course Objectives

Upon completing this course, students will be able to:

  1. Describe the working principle and operation of modern devices such as iphone and smart phone sensors, automobile safety sensors, biomedical sensors, and implantable devices.
  2. Discuss the microelectronic process modules for design and fabrication of miniaturized (micro/nano) devices.
  3. Explain materials and device characterization techniques used in microfabrication domain.

Important Information

Policies

Please review the FIU's Policies webpage. The policies webpage contains essential information regarding guidelines relevant to all courses at FIU, as well as additional information about acceptable netiquette for online courses.

As a member of the FIU community you are expected to be knowledgeable about the behavioral expectations set forth in the FIU Student Code of Conduct.

Technical Requirements and Skills

One of the greatest barriers to taking an online course is a lack of basic computer literacy. By computer literacy we mean being able to manage and organize computer files efficiently, and learning to use your computer's operating system and software quickly and easily. Keep in mind that this is not a computer literacy course; but students enrolled in online courses are expected to have moderate proficiency using a computer. Please go to the "What's Required" webpage to find out more information on this subject.

Please visit our Technical Requirements webpage for additional information.

Privacy Policy Statements for Partners and Vendors

Accessibility and Accommodation

The Disability Resource Center collaborates with students, faculty, staff, and community members to create diverse learning environments that are usable, equitable, inclusive and sustainable. The DRC provides FIU students with disabilities the necessary support to successfully complete their education and participate in activities available to all students. If you have a diagnosed disability and plan to utilize academic accommodations, please contact the Center at 305-348-3532 or visit them at the Graham Center GC 190.

Please visit our ADA Compliance webpage for information about accessibility involving the tools used in this course.

Web Accessibility Statements for Partners and Vendors 

Please learn about Accessibility with Canvas for more information.

For additional assistance please contact FIU's Disability Resource Center.

Academic Misconduct Statement

Florida International University is a community dedicated to generating and imparting knowledge through excellent teaching and research, the rigorous and respectful exchange of ideas and community service. All students should respect the right of others to have an equitable opportunity to learn and honestly to demonstrate the quality of their learning. Therefore, all students are expected to adhere to a standard of academic conduct, which demonstrates respect for themselves, their fellow students, and the educational mission of the University. All students are deemed by the University to understand that if they are found responsible for academic misconduct, they will be subject to the Academic Misconduct procedures and sanctions, as outlined in the Student Handbook.

Academic Misconduct includes: Cheating – The unauthorized use of books, notes, aids, electronic sources; or assistance from another person with respect to examinations, course assignments, field service reports, class recitations; or the unauthorized possession of examination papers or course materials, whether originally authorized or not. Plagiarism – The use and appropriation of another’s work without any indication of the source and the representation of such work as the student’s own. Any student who fails to give credit for ideas, expressions or materials taken from another source, including internet sources, is responsible for plagiarism.

Learn more about the academic integrity policies and procedures as well as student resources that can help you prepare for a successful semester.

Panthers Care & Counseling and Psychological Services (CAPS)

If you are looking for help for yourself or a fellow classmate, Panthers Care encourages you to express any concerns you may come across as it relates to any personal behavior concerns or worries you have, for the classmate’s well-being or yours; you are encouraged to share your concerns with FIU’s Panthers Care website.

Counseling and Psychological Services (CAPS) offers free and confidential help for anxiety, depression, stress, and other concerns that life brings. Learn more about CAPS at caps.fiu.edu. Professional counselors are available for same-day appointments. Don’t wait to call 305-348-2277 to set up a time to talk or visit the online self-help portal.

Course Prerequisites

  • This course has no prerequisites and it is open for graduate and senior undergraduate students.

Proctored Exam Policy

Exam 2 will be proctored via Honorlock. Please visit our Student Proctored Exam Instructions webpage for important information concerning proctored exams, proctoring centers, and important forms.

Textbook and Course Materials

Microsystem Design (recommended, not required)
title : 

Microsystem Design (recommended, not required)

authors : 
Stephen D. Senturia
publisher : 
Springer, Jul-2005
publish date : 
Jul-2005
isbn 10 : 
9780792372462
isbn 13 : 
0792372468
It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

Expectations of This Course

This is an online course, which means most (if not all) of the course work will be conducted online. Expectations for performance in an online course are the same for a traditional course. In fact, online courses require a degree of self-motivation, self-discipline, and technology skills which can make these courses more demanding for some students.

Students are expected to:

  • Review the how to get started information located in the course content
  • Introduce yourself to the class during the first week by posting a self-introduction in the appropriate
    discussion forum
  • Take the practice quiz to ensure that your computer is compatible with Canvas
  • Interact online with instructor/s and peers
  • Review and follow the course calendar
  • Log in to the course three hours minimum per week
  • Respond to discussion boards, blogs, and journal postings within one day
  • Respond to messages within one day
  • Submit assignments by the corresponding deadline

The instructor will:

  • Log in to the course two times per week
  • Respond to discussion boards, blogs, and journal postings within four day
  • Respond to messages within two day
  • Grade assignments within one week of the assignment deadline

Course Detail

Course Content (Tantative)

Module 1: Introduction to Sensors and MEMS    
Introduction to sensors
MEMS Technology
                                           

Module 2: Microfabrication - How these sensors are made?

Silicon
Fundamentals of lithography
Advanced Lithography
Etching techniques, etch stops, wet and dry etching, silicon etching
Si Crystal Growth, Crystal Orientation, Oxidation and Interface Defects –how to
use them for novel class of devices
Doping
Deposition (Physical and chemical vapor deposition techniques – how devices can be made)
Bulk micromachining
Surface micromachining
Wafer bonding


Module 3: Applications of basic principles for device development - MEMS transducers

Scaling
Mechanical devices (beams, plates)
Capacitive sensing and actuating (pressure sensor, microphone, humidity, and
accelerometers)
Piezoresistive transducers (pressure and acceleration sensors)
MEMS thermal transducers (temperature infrared, flow, pressure)
Energy scavenging
Gyroscopes
Micro-optical devices
Microfluidics

Module 4: Applications of basic principles for device development - Biochemical sensors

Biosensors
Chemical Sensors
Wearable Devices


Course Communication

Communication in this course will take place within Canvas. See the Canvas Guide on communicating with course users for more information.

Discussion Forums

Keep in mind that your discussion forum postings will likely be seen by other members of the course. Care should be taken when determining what to post.

Introduce Yourself:

  • Students will post their course self introduction in this forum using the guidelines posted within the first week of class
  • Available dates (unlimited)

General Forum:

  • Students may post general concerns related to the class
  • Students cannot post any assignment results/answers or related files
  • Available dates (unlimited )
  • Forums are not graded, it is another mean to help students via peer discussion

Topic Discussion Forum:

  • This course includes 10 discussion post assignments.
  • Students will be given an open-ended prompt pertaining to module content.
  • Students should be post at least two responses, either an original post or a reply to a peer's post.
  • Use the Topic Discussion Rubric when compiling your post.
  • The expected turn-around time for feedback is two days.

Quizzes

In order to mitigate any issues with your computer and online assessments, it is very important that you take the "Practice Quiz" from each computer you will be using to take your graded quizzes and exams. It is your responsibility to make sure your computer meets the minimum hardware requirements.

Module Quizzes:

  • This course requires 4 multiple-choice quizzes.
  • Each quiz is due on Sunday at 11:59 p.m.
  • Availability is unlimited.
  • Duration is unlimited.
  • No late submissions are permitted.
  • The score is available immediately upon submission.

Exams:

  • This course requires three exams.
    Exam 1 covers Module 1 and  2. (It is an open-book exam and is not proctored.) Available Wednesday at 10:00 AM - Friday at 11:59 PM
    Exam 2 covers all course material. (proctored via Honorlock available Monday at 12:00 AM - Thursday at 11:59 PM)
  • 40% of questions are multiple-choice format and 60% of questions require handwritten work via file upload.
  • Duration is 180 minutes.
  • No late submissions are permitted.
  • The score is available approximately two days after upon submission.
  • The answers are available after the availability date ends

Assessments in this course are not compatible with mobile devices and should not be taken through a mobile phone or a tablet. If you need further assistance please contact FIU Online Support Services.

Assignments 

Practice Assignments:

  • Students will be given a set of problems to solve based on module content.
  • Solutions are provided.
  • Availability is unlimited
  • No submission is required.

Assignments:

  • Students will be given a set of problems to solve based on module content.
  • Solutions are not provided.
  • Submissions are due Sundays at 11:59 PM
  • Submission will require require handwritten work via file upload.
  • Availability is unlimited.
  • No group work is permitted.
  • No late submissions are permitted.
  • Grading criteria is provided in assignment file.
  • The expected turn-around time for feedback is two days

Zoom Video Conference

Zoom is a video conference tool that you can use to interact with your professor and fellow students by sharing screens, chatting, broadcasting live video/audio, and taking part in other interactive online activities. We will be utilizing this tool to conduct meetings as needed.

The Zoom Test Meeting Room room is available to test out the software before joining an actual session.

Reference the links below to access Zoom student tutorials to learn about the tool, how to access your meeting room, and share your screen.

Grading

Course Requirements
Number of Items
Points for Each
Total Points Available
Weight
Quizzes
4
2080
10%
Topic Discussions4
1040
10%
Assignments 4
2080
20%
Exam 1110010030%
Exam 2 (Final)110010030%
Total
20
N/A500100%

Letter Grades

LetterRange (%)LetterRange (%)
LetterRange (%)
A94 or aboveB83 - 86C70 - 76
A-90 - 93B-80 - 82D60- 69
B+87-89C+77 - 79F59 or less