Overview
1221 - EEE6466 & EEE4463 - & MEMS I - Sections RVC - Spring 2022
1221-FIU01-EEE-6466-SECRVC-20208
General Information
Professor Information
Instructor
Mubarak Mujawar
Office
EC3942
phone
(305) 348-2683
Office Hours
By Appointment
Website
Course Description and Purpose
This class will help students understand how modern devices such as iphone and smart phone sensors, automobile safety sensors, biomedical sensors, implantable devices, gaming consoles, virtual reality and augmented reality sensors, Digital Light Processing (DLP) in display devices. This course is an introduction to microfabrication techniques intended for graduate and senior students to familiarize engineering and science students to the science of miniaturization. Different options to make very small machines (micro and nano size) are reviewed. The course covers such subjects as materials properties, fabrication techniques, packaging, and applications.
Course Objectives
Upon completing this course, students will be able to:
Important Information
Policies
Please review the FIU's Policies webpage. The policies webpage contains essential information regarding guidelines relevant to all courses at FIU, as well as additional information about acceptable netiquette for online courses.
As a member of the FIU community you are expected to be knowledgeable about the behavioral expectations set forth in the FIU Student Code of Conduct.
Technical Requirements and Skills
One of the greatest barriers to taking an online course is a lack of basic computer literacy. By computer literacy we mean being able to manage and organize computer files efficiently, and learning to use your computer's operating system and software quickly and easily. Keep in mind that this is not a computer literacy course; but students enrolled in online courses are expected to have moderate proficiency using a computer. Please go to the "What's Required" webpage to find out more information on this subject.
Please visit our Technical Requirements webpage for additional information.
Accessibility and Accommodation
The Disability Resource Center collaborates with students, faculty, staff, and community members to create diverse learning environments that are usable, equitable, inclusive and sustainable. The DRC provides FIU students with disabilities the necessary support to successfully complete their education and participate in activities available to all students. If you have a diagnosed disability and plan to utilize academic accommodations, please contact the Center at 305-348-3532 or visit them at the Graham Center GC 190.
Please visit our ADA Compliance webpage for information about accessibility involving the tools used in this course.
Please learn about Accessibility with Canvas for more information.
For additional assistance please contact FIU's Disability Resource Center.
Academic Misconduct Statement
Florida International University is a community dedicated to generating and imparting knowledge through excellent teaching and research, the rigorous and respectful exchange of ideas and community service. All students should respect the right of others to have an equitable opportunity to learn and honestly to demonstrate the quality of their learning. Therefore, all students are expected to adhere to a standard of academic conduct, which demonstrates respect for themselves, their fellow students, and the educational mission of the University. All students are deemed by the University to understand that if they are found responsible for academic misconduct, they will be subject to the Academic Misconduct procedures and sanctions, as outlined in the Student Handbook.
Academic Misconduct includes: Cheating – The unauthorized use of books, notes, aids, electronic sources; or assistance from another person with respect to examinations, course assignments, field service reports, class recitations; or the unauthorized possession of examination papers or course materials, whether originally authorized or not. Plagiarism – The use and appropriation of another’s work without any indication of the source and the representation of such work as the student’s own. Any student who fails to give credit for ideas, expressions or materials taken from another source, including internet sources, is responsible for plagiarism.
Learn more about the academic integrity policies and procedures as well as student resources that can help you prepare for a successful semester.
Panthers Care & Counseling and Psychological Services (CAPS)
If you are looking for help for yourself or a fellow classmate, Panthers Care encourages you to express any concerns you may come across as it relates to any personal behavior concerns or worries you have, for the classmate’s well-being or yours; you are encouraged to share your concerns with FIU’s Panthers Care website.
Counseling and Psychological Services (CAPS) offers free and confidential help for anxiety, depression, stress, and other concerns that life brings. Learn more about CAPS at caps.fiu.edu. Professional counselors are available for same-day appointments. Don’t wait to call 305-348-2277 to set up a time to talk or visit the online self-help portal.
Course Prerequisites
Proctored Exam Policy
Exam 2 will be proctored via Honorlock. Please visit our Student Proctored Exam Instructions webpage for important information concerning proctored exams, proctoring centers, and important forms.
Textbook and Course Materials
Microsystem Design (recommended, not required)
Expectations of This Course
This is an online course, which means most (if not all) of the course work will be conducted online. Expectations for performance in an online course are the same for a traditional course. In fact, online courses require a degree of self-motivation, self-discipline, and technology skills which can make these courses more demanding for some students.
Students are expected to:
The instructor will:
Course Detail
Course Content (Tantative)
Module 2: Microfabrication - How these sensors are made?
Silicon
Fundamentals of lithography
Advanced Lithography
Etching techniques, etch stops, wet and dry etching, silicon etching
Si Crystal Growth, Crystal Orientation, Oxidation and Interface Defects –how to
use them for novel class of devices
Doping
Deposition (Physical and chemical vapor deposition techniques – how devices can be made)
Bulk micromachining
Surface micromachining
Wafer bonding
Module 3: Applications of basic principles for device development - MEMS transducers
Scaling
Mechanical devices (beams, plates)
Capacitive sensing and actuating (pressure sensor, microphone, humidity, and
accelerometers)
Piezoresistive transducers (pressure and acceleration sensors)
MEMS thermal transducers (temperature infrared, flow, pressure)
Energy scavenging
Gyroscopes
Micro-optical devices
Microfluidics
Module 4: Applications of basic principles for device development - Biochemical sensors
Biosensors
Chemical Sensors
Wearable Devices
Course Communication
Communication in this course will take place within Canvas. See the Canvas Guide on communicating with course users for more information.
Discussion Forums
Keep in mind that your discussion forum postings will likely be seen by other members of the course. Care should be taken when determining what to post.
Introduce Yourself:
General Forum:
Topic Discussion Forum:
Quizzes
In order to mitigate any issues with your computer and online assessments, it is very important that you take the "Practice Quiz" from each computer you will be using to take your graded quizzes and exams. It is your responsibility to make sure your computer meets the minimum hardware requirements.
Module Quizzes:
Exams:
Assessments in this course are not compatible with mobile devices and should not be taken through a mobile phone or a tablet. If you need further assistance please contact FIU Online Support Services.
Assignments
Practice Assignments:
Assignments:
Zoom Video Conference
Zoom is a video conference tool that you can use to interact with your professor and fellow students by sharing screens, chatting, broadcasting live video/audio, and taking part in other interactive online activities. We will be utilizing this tool to conduct meetings as needed.
The Zoom Test Meeting Room room is available to test out the software before joining an actual session.
Reference the links below to access Zoom student tutorials to learn about the tool, how to access your meeting room, and share your screen.
Grading
Course Requirements | Number of Items | Points for Each | Total Points Available | Weight |
---|---|---|---|---|
Quizzes | 4 | 20 | 80 | 10% |
Topic Discussions | 4 | 10 | 40 | 10% |
Assignments | 4 | 20 | 80 | 20% |
Exam 1 | 1 | 100 | 100 | 30% |
Exam 2 (Final) | 1 | 100 | 100 | 30% |
Total | 20 | N/A | 500 | 100% |
Letter Grades
Letter | Range (%) | Letter | Range (%) | Letter | Range (%) |
---|---|---|---|---|---|
A | 94 or above | B | 83 - 86 | C | 70 - 76 |
A- | 90 - 93 | B- | 80 - 82 | D | 60- 69 |
B+ | 87-89 | C+ | 77 - 79 | F | 59 or less |